GB/T 48094-2026 等离子体参数测试方法

ICS17.180.99

CCSL50

中华人民共和国国家标准

GB/T48094—2026

等离子体参数测试方法

Testmethodofplasmaparameters

2026⁃08⁃28发布2027⁃03⁃01实施

国家市场监督管理总局

国家标准化管理委员会发布

GB/T48094—2026

目次

前言··························································································································Ⅲ

1范围·······················································································································1

2规范性引用文件········································································································1

3术语和定义··············································································································1

4测试原理·················································································································2

5测试条件·················································································································3

5.1环境条件···········································································································3

5.2测试设备条件·····································································································4

5.3气体类型与纯度要求····························································································4

6测试设备·················································································································4

6.1光源选择···········································································································4

6.2光谱仪··············································································································4

6.3数据显示与采集系统····························································································4

6.4出射激光收集系统·······························································································5

7测试步骤·················································································································5

7.1活性粒子···········································································································5

7.2离子参数···········································································································5

7.3电子参数···········································································································5

8数据处理·················································································································5

8.1活性粒子···········································································································5

8.2离子参数···········································································································5

8.3电子参数···········································································································6

9测试报告·················································································································7

附录A（资料性）测试参数推导过程················································································9

A.1离子参数···········································································································9

A.2电子参数·········································································································10

附录B（资料性）部分活性粒子测试参考特征及跃迁波长····················································16

附录C（资料性）测试报告模板·····················································································18

参考文献····················································································································20

Ⅰ

GB/T48094—2026

前言

本文件按照GB/T1.1—2020《标准化工作导则第1部分：标准化文件的结构和起草规则》的规

定起草。

请注意本文件的某些内容可能涉及专利。本文件的发布机构不承担识别专利的责任。

本文件由中国科学院提出。

本文件由全国光电测试标准化技术委员会（SAC/TC487）归口。

本文件起草单位：中国科学技术大学、云南大学、安徽中科大禹科技有限公司、南昌大学、中国科学

院空天信息创新研究院、中国科学院合肥物质科学研究院、安徽中科聚变太赫兹科技有限公司、核工业

西南物理研究院、费勉科技（上海）股份有限公司、中国科学技术大学先进技术研究院、中国计量大学、

池州学院、北京环境特性研究所。

本文件主要起草人：吴征威、刘琦、黄永海、欧阳文冲、王璞、张乔枫、谢锦林、潘卓超、储江南、

刘海庆、王宏北、聂林、张晓世、谢斌平、朱骥文、张淑琴、汪新建、梅林、孙金海。

Ⅲ

GB/T48094—2026

等离子体参数测试方法

1范围

本文件描述了等离子体参数的测试方法。

本文件适用于常压、低压和高真空下激发的等离子体的主要参数测试。

本文件不适用于天体低密度等离子体。

2规范性引用文件

本文件没有规范性引用文件。

3术语和定义

下列术语和定义适用于本文件。

3.1

等离子体plasma

由离子、电子和中性粒子组成的宏观上平均电荷呈电中性的电离气体。

注：特指电子温度位于103K~105K，电子密度位于1012cm-3~1016cm-3的等离子体。

[来源：GB27955—2020，3.1，有修改]

3.2

谱线轮廓lineprofile

发射辐射强度随波长变化的曲线。

3.3

激发能excitationenergy

E

原子由基态跃迁到高于基态的给定能级所需的能量。

3.4

基态groundstate

原子、离子或分子能量最低的状态。

注：基态的能量定义为零。

3.5

电子温度electrontemperature

Te

等离子体中电子做无规则热运动时的平均动能。

3.6

电子密度electrondensity

ne

单位体积等离子体中的自由电子数量。

3.7

活性粒子reactivespecies

等离子体中存在的单线态氧、超氧自由基、臭氧、羟基自由基、过氧化氢和过氧亚硝基等活性氧和

1