GB/T 44538-2024 碳基薄膜 椭偏光谱法测定非晶态碳基薄膜的光学性能
GB/T 44538-2024 Carbon based films—Determination of optical properties of amorphous carbon films by spectfoscopic ellipsometry
基本信息
本文件适用于通过离子蒸镀、溅射、电弧沉积、等离子体辅助化学气相沉积、热丝等工艺沉积的非晶碳基薄膜。
本文件不适用于通过金属或硅改性的非晶碳基薄膜，或在薄膜厚度上存在成分/性质梯度的非晶碳基薄膜。
发布历史
-
2024年09月
研制信息
- 起草单位：
- 中国机械总院集团武汉材料保护研究所有限公司、纳狮新材料有限公司、安徽纯源镀膜科技有限公司、中国科学院深圳先进技术研究院、广东电网有限责任公司、广州今泰科技股份有限公司
- 起草人：
- 段海涛、贾丹、曹一莹、张心凤、沈学忠、高明、詹胜鹏、凃杰松、王彦峰、王流火、杨田、陈辉、骆小双、尤锦鸿、易娟、苏东艺
- 出版信息：
- 页数：12页 | 字数：15 千字 | 开本： 大16开
内容描述
ICS
25.220.99
CCS
A29
中华人民共和国国家标准
GB/T44538—2024
碳基薄膜椭偏光谱法测定
非晶态碳基薄膜的光学性能
Carbonbasedfilms—Determinationofopticalpropertiesofamorphouscarbon
filmsbyspectfoscopicellipsometry
（ISO23216：2021,MOD）
2024-09-29发布2025-05-01实施
国家市场监督管理总局
发布
国家标准化管理委员会
GB/T44538—2024
目次
前言
Ⅲ
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范围
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2
规范性引用文件
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3
术语和定义
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4
试样制备
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5
设备
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5.1
卤素灯和蓝光LED灯
1
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