GB/T 48096-2026 微机电结构动态位移参数的激光多普勒测量方法

ICS17.180.99

CCSL50

中华人民共和国国家标准

GB/T48096—2026

微机电结构动态位移参数的

激光多普勒测量方法

LaserDopplermeasurementmethodfordynamicdisplacementparametersof

micro⁃electromechanicalstructures

2026⁃08⁃28发布2027⁃03⁃01实施

国家市场监督管理总局

国家标准化管理委员会发布

GB/T48096—2026

目次

前言··························································································································Ⅲ

1范围·······················································································································1

2规范性引用文件········································································································1

3术语和定义··············································································································1

4原理·······················································································································1

5测量条件·················································································································2

6仪器设备·················································································································3

7样品·······················································································································3

8测量步骤·················································································································3

8.1测量前准备········································································································3

8.2动态位移···········································································································4

8.3共振频率···········································································································5

8.4品质因数···········································································································5

8.5工作振型···········································································································6

8.6模态振型···········································································································7

9测量报告·················································································································7

附录A（资料性）激光多普勒测振原理·············································································9

附录B（资料性）微机电结构扫描区域和测量点划分··························································11

附录C（资料性）测量报告记录表··················································································13

参考文献····················································································································15

Ⅰ

GB/T48096—2026

前言

本文件按照GB/T1.1—2020《标准化工作导则第1部分：标准化文件的结构和起草规则》的规定

起草。

请注意本文件的某些内容可能涉及专利。本文件的发布机构不承担识别专利的责任。

本文件由中国科学院提出。

本文件由全国光电测量标准化技术委员会（SAC/TC487）和全国微机电技术标准化技术委员会

（SAC/TC336）共同归口。

本文件起草单位：浙江舜辉光学科技有限公司、余姚舜宇智能光学技术有限公司、中国计量大学、

中国科学院空天信息创新研究院、清华大学、浙江大立科技股份有限公司、杭州士兰微电子股份有限公

司、天地伟业技术有限公司、天津大学、歌尔微电子股份有限公司、舜宇集团有限公司、浙江省质量科学

研究院、宁波职业技术大学、浙江宇视科技有限公司、苏州明皜传感科技股份有限公司、苏州热工研究

院有限公司、北京清华长庚医院、北京航天控制仪器研究所、中国科学院微电子研究所。

本文件主要起草人：宋云峰、王忠伟、李方浩、王璞、尉昊赟、姜利军、王敏昌、薛超、桑梅、宋青林、

劳云峰、姚磊、王正才、邓黄燕、张沛、林磊、胡敏、刘福民、霍树春、陈亮、罗坤杰、朱俊铭、杨哲霖、

徐小选、项国平、董洁、吴德林、魏云、费强、周志海、张子怡。

Ⅲ

GB/T48096—2026

微机电结构动态位移参数的

激光多普勒测量方法

1范围

本文件规定了微机电结构动态位移参数激光多普勒测量的原理、测量条件、仪器设备、样品、测量

步骤。

本文件适用于微机电结构研制、设计、生产和检测。

2规范性引用文件

下列文件中的内容通过文中的规范性引用而构成本文件必不可少的条款。其中，注日期的引用文

件，仅该日期对应的版本适用于本文件；不注日期的引用文件，其最新版本（包括所有的修改单）适用于

本文件。

GB/T20485.41—2015振动与冲击传感器校准方法第41部分：激光测振仪校准

3术语和定义

下列术语和定义适用于本文件。

3.1

微机电结构micro⁃electromechanicalstructure

基于微纳制造技术制备的，特征尺寸为几毫米到几微米的功能结构。

注：微加速度传感器、微陀螺仪、微声学传感器、微压力传感器、微谐振器、微振镜等微机电系统（MEMS）器件的主

要功能结构。

3.2

面外振动out⁃of⁃planevibration

将微机电结构基底作为一个参考平面，方向垂直于参考平面的振动分量。

3.3

面内振动in⁃planevibration

将微机电结构基底作为一个参考平面，方向平行于参考平面的振动分量。

3.4

工作振型operationaldeflectionshape

微机电结构工作在某一频率下的振动形态。

注：描述了微机电结构在工作状态下不同位置在同一时间的相对振动分布。

3.5

模态振型modalshape

微机电结构工作在固有频率下的振动形态。

注：描述了微机电结构在固有频率下不同位置在同一时间的相对振动分布。

4原理

微机电结构动态位移参数激光多普勒测量原理示意图见图1。根据微机电结构样品固有频率特

1