GB/T 44605-2024 激光器和激光相关设备 激光光学元件吸收分布测量 光热成像法

ICS

31.260

CCS

L51

中华人民共和国国家标准

GB/T44605—2024

激光器和激光相关设备激光光学

元件吸收分布测量光热成像法

Laserandlaser-relatedequipment—Absorptiondistributionmeasurementof

opticallasercomponents—Photothermalmappingmethod

（ISO23701:2023,Opticsandphotonics—Laserandlaser-related

equipment—Photothermaltechniqueforabsorptionmeasurementandmappingof

opticallasercomponents，MOD）

2024-09-29发布2025-04-01实施

国家市场监督管理总局发布

国家标准化管理委员会

GB/T44605—2024

目次

前言

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1

范围

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2

规范性引用文件

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3

术语和定义

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1

4

符号和量度单位

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5

测量原理

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5.1

概述

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5.2

光热透镜（TL）

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5.3

光热偏转（PTD）

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5.4

反射式光热探测构型和透射式光热探测构型的选取原则

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5.5

光热测量系统

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6

测量设备

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6.1

泵浦激光器

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6.2

探测激光器

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6.3

位移平台

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6.4

探测单元

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6.5

数据采集与处理装置

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7

测试准备

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7.1

测试环境

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7.2

测试样品准备

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8

测试程序

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8.1

通则

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8.2

光热信号幅值和相位测量

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8.3

光热信号幅值和相位分布测量

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8.4

光热信号幅值的标定

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8.5

测量结果评估

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9

结果评定

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9.1

吸收的光热测量

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9.2

吸收率的光热标定

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9.3

吸收的二维/三维分布成像测量

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9.4

成像区域和空间分辨率

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10

测试报告

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附录A（资料性）表面吸收和体吸收的分离

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A.1

概述

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GB/T44605—2024

A.2

用于区分表面吸收和体吸收的光热探测布局

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A.3

表面吸收和体吸收的确定

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附录B（资料性）标定的理论和实际考虑

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B.1

概述

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B.2

标定的理论考虑

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B.3

标定样品的实际考虑

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附录C（资料性）测试报告

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参考文献

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Ⅱ

GB/T44605—2024

前言

本文件按照GB/T1.1—2020《标准化工作导则第1部分：标准化文件的结构和起草规则》的规

定起草。

本文件修改采用ISO23701：2023《光学和光子学激光器和激光相关设备激光光学元件吸收测

量和成像的光热技术》。

本文件与ISO23701：2023相比做了下述结构调整：

—第5章对应ISO23701：2023的5.1；

—第6章对应ISO23701：2023的5.2；

—第7章对应ISO23701：2023的5.3；

—第8章对应ISO23701：2023第6章；

—第9章对应ISO23701：2023第7章；

—第10章对应ISO23701：2023第8章；

—附录A对应ISO23701：2023附录B；

—附录B对应ISO23701：2023附录A。

本文件与ISO23701：2023的技术差异及其原因如下：

—用规范性引用的GB/T15313代替了ISO11145（见第3章），以适应我国的技术条件；

—用规范性引用的GB/T25915.1—2021代替了ISO14644﹘l（见7.1），以适应我国的技术

条件；

—删除了ISO23701：2023中6.4附录B的引用，附录B给出的是表面吸收与体吸收的分离，并没

有直接给出三维吸收分布扫描测量中深度方向测量时的标定程序。

本文件做了下列编辑性改动：

—将标准名称改为《激光器和激光相关设备激光光学元件吸收分布测量方法光热成像法》，

与现有标准协调。

请注意本文件的某些内容可能涉及专利。本文件的发布机构不承担识别专利的责任。

本文件由中国机械工业联合会提出。

本文件由全国光学和光子学标准化技术委员会（SAC/TC103）归口。

本文件起草单位：电子科技大学、中国工程物理研究院应用电子学研究所、中国兵器工业标准化研

究所、中国工程物理研究院激光聚变研究中心、山东华光光电子股份有限公司、中国科学院大连化学物

理研究所、中国科学院上海光学精密机械研究所、西南技术物理研究所、湖北久之洋红外系统股份有限

公司、湖南戴斯光电有限公司。

本文件主要起草人：李斌成、樊峻棋、彭琛、黄德权、孟凡萍、卫耀伟、柴立群、吴德华、李刚、

王锋、赵元安、叶大华、徐旭、梁小生。

Ⅲ

GB/T44605—2024

激光器和激光相关设备激光光学

元件吸收分布测量光热成像法

1范围

本文件描述了激光光学元件的吸收测量和高空间分辨率二维/三维扫描吸收分布成像测量方法。采

用光热测量方法，通过标定实现激光光学元件的吸收测量，通过位置扫描实现吸收分布测量。

本文件适用于激光光学元件二维/三维吸收分布成像测量，即测量吸收与位置的函数，用于高功率/高

能激光系统中的大口径光学元件的吸收缺陷/吸收分布检测。

2规范性引用文件

下列文件中的内容通过文中的规范性引用而构成本文件必不可少的条款。其中，注日期的引用文

件，仅该日期对应的版本适用于本文件；不注日期的引用文件，其最新版本（包括所有的修改单）适用

于本文件。

GB/T15313激光术语（GB/T15313—2008，ISO11145：2006，MOD）

GB/T25915.1—2021洁净室及相关受控环境第1部分：按粒子浓度划分空气洁净度等级

（ISO14644﹘1：2015，MOD）

ISO80000﹘7量和单位第7部分：光及辐射（Quantitiesandunits—Part7:Lightandradi﹘

ation）

3术语和定义

GB/T15313和ISO80000﹘7界定的以及下列术语和定义适用于本文件。

3.1

吸收absorption

激光光学元件吸收的辐射通量。

3.2

吸收率absorptance

吸收辐射通量与输入辐射通量的比值。

3.3

吸收分布图absorptionmap

吸收率分布图absorptancemap

样品不同位置测量的吸收（3.1）/吸收率（3.2）。

注：本文件中使用的吸收率定义仅限于将吸收的能量转化为热量的吸收过程。对于某些类型的光学元件和辐射，另

外的非热学过程可能会导致吸收损耗，本文件中描述的测试方法无法检测到。

4符号和量度单位

表1给出了本文件中使用符号的含义和量度单位（若涉及）。

1

GB/T44605—2024

表1使用的符号和量度单位

符号单位含义

A—被测样品的吸收率

A0—标定样品的吸收率

S—被测样品的光热信号幅值

S0—标定样品的光热信号幅值

P、P0W泵浦光束功率

ΔI、I0—光热透镜中探测到的探测光强变化和直流探测光强度

I1、I2—光热偏转中二象限光电探测器的两个光探测器探测的探测光强度

Dm2s-1被测样品的热扩散系数

Δφ（x,y）—光热引起的探测光的光学相移

αthK-1被测样品的线性热膨胀系数

dn/dTK-1被测样品的折射率温度系数

v—被测样品的泊松比

fHz泵浦光束的调制频率

μthm被测样品的热扩散长度

am泵浦光束入射到被测样品的光斑半径

λm探测光束的波长

zm探测距离

T（x,y,z）K被测样品或者标定样品内部由于光热效应导致的温升分布

B、C—比例系数

β—根据标定样品的功率归一化光热幅值与测量的吸收率线性拟合的斜率

5测量原理

5.1概述

在一个典型光热吸收测量实验中，一束连续波或者高重频脉冲泵浦激光辐照待测样品，由于光吸

收，样品内部产生热量，形成一定的温度分布。对激光光学元件，样品由于热膨胀会产生表面形变，而

温度梯度分布也会导致光学元件的折射率随温度分布产生梯度变化。基于光热效应，采用另一束探测激

光光束来检测被测样品表面形变或者折射率梯度变化，能测量样品的吸收/吸收率。通过标定光热信号

幅值能得到被测样品的绝对吸收/吸收率；通过测量样品不同位置的吸收/吸收率，能得到整个样品的吸

收/吸收率分布结果。

光热透镜（或热透镜TL）和光热偏转（PTD）均可用于激光光学元件吸收测量及吸收分布扫描测

量，在小信号近似下，光热信号的幅值与激光光学元件的吸收/吸收率成线性比例关系，因此基于反射

探测光束和透射探测光束的光热构型均可用于激光光学元件的吸收测量和吸收分布成像。

5.2光热透镜（TL）

在光热透镜测量构型中，一束聚焦泵浦激光辐照样品表面，由于吸收激光束能量而产生表面形变分

2

GB/T44605—2024

布或体内折射率梯度分布，使得这一被照射区域类似一个负透镜（或正透镜）。用另一束未聚焦的探测

光束辐照在相同区域，反射或透射的探测光束中心光强的改变就代表光热信号。采用一针孔光电探测器

（光电探测器前带小孔光阑）测量探测光光强的变化，得到光热信号。

5.3光热偏转（PTD）

在光热偏转测量构型中，聚焦泵浦激光辐照样品表面，在被辐照区域由于吸收激光束能量产生