GB/T 25187-2024 表面化学分析 俄歇电子能谱 选择仪器性能参数的表述

ICS

71.040.40

CCS

G04

中华人民共和国国家标准

GB/T25187—2024/ISO15471：2016

代替GB/T25187—2010

表面化学分析俄歇电子能谱

选择仪器性能参数的表述

Surfacechemicalanalysis—Augerelectronspectroscopy—Description

ofselectedinstrumentalperformanceparameters

（ISO15471：2016，IDT）

2024-11-28发布2025-06-01实施

国家市场监督管理总局发布

国家标准化管理委员会

GB/T25187—2024/ISO15471：2016

目次

前言

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Ⅲ

引言

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Ⅳ

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范围

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2

规范性引用文件

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3

术语和定义

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4

符号和缩略语

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5

选择仪器性能参数的表述

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5.1

分析方法

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5.2

样品

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5.3

系统配置

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5.4

电子枪阴极

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5.5

横向分辨和束流

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5.6

谱仪信号强度和能量分辨

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5.7

谱仪能量标

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5.8

谱仪强度线性

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5.9

谱仪响应函数

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5.10

谱仪参数

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5.11

图像漂移

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5.12

真空环境

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参考文献

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Ⅰ

GB/T25187—2024/ISO15471：2016

前言

本文件按照GB/T1.1—2020《标准化工作导则第1部分：标准化文件的结构和起草规则》的规

定起草。

本文件代替GB/T25187—2010《表面化学分析俄歇电子能谱选择仪器性能参数的表述》，与

GB/T25187—2010相比，除结构调整和编辑性改动外，主要技术变化如下：

─更改了噪声测量方法2（见5.6.3，2010年版的5.6.3）。

本文件等同采用ISO15471：2016《表面化学分析俄歇电子能谱选择仪器性能参数的表述》。

请注意本文件的某些内容可能涉及专利。本文件的发布机构不承担识别专利的责任。

本文件由全国微束分析标准化技术委员会（SAC/TC38）提出并归口。

本文件起草单位：厦门荷清教育咨询有限公司、厦门大学、中国科学院化学研究所。

本文件主要起草人：岑丹霞、徐富春、李建辉、汤丁亮、刘芬、王水菊。

本文件于2010年首次发布，本次为第一次修订。

Ⅲ

GB/T25187—2024/ISO15471：2016

引言

全球有多家厂商生产俄歇电子能谱仪（AES）和扫描俄歇电子显微镜（SAM）。尽管每台仪器的

AES分析方法的基本原理是相同的，但仪器的具体设计和性能说明的方式各不相同。因此，通常很难比

较不同厂商生产的仪器性能。本文件提供一个基本项目单，以使所有俄歇电子能谱仪能以共同的方式来

表述。本文件无意取代厂商的说明书，厂商的说明书可能长达30页或更多。本文件目的是使厂商说明

书中确定的某些项目具有一致和明确的含义。

Ⅳ

GB/T25187—2024/ISO15471：2016

表面化学分析俄歇电子能谱

选择仪器性能参数的表述

1范围

本文件规定了俄歇电子能谱仪特定性能参数的表述要求。

本文件适用于俄歇电子能谱仪的性能参数表述。

2规范性引用文件

下列文件中的内容通过文中的规范性引用而构成本文件必不可少的条款。其中，注日期的引用文

件，仅该日期对应的版本适用于本文件；不注日期的引用文件，其最新版本（包括所有的修改单）适用

于本文件。

ISO18115﹘1表面化学分析词汇第1部分：通用术语及谱学术语（Surfacechemicalanalys﹘

is—Vocabulary—Part1：Generaltermsandtermsusedinspectroscopy）

注：GB/T22461.1—2023表面化学分析词汇第1部分：通用术语及谱学术语（ISO18115﹘1：2013，IDT）

3术语和定义

ISO18115﹘1界定的术语和定义适用于本文件。

4符号和缩略语

下列符号和缩略语适用于本文件。

AES：俄歇电子能谱（augerelectronspectroscopy）

俄歇电子能谱仪（augerelectronspectrometer）

FL：费米能级（fermilevel）

FWHM：半高峰宽（fullwidthathalfmaximum）

rms：均方根（rootmeansquare）

SAM：扫描俄歇电子显微镜（scanningaugerelectronmicroscope）

扫描俄歇电子显微术（scanningaugerelectronmicroscopy）

SEM：扫描电子显微镜（scanningelectronmicroscope）

VL：真空能级（vacuumlevel）

注：长期以来，AES仪器的动能标参考VL，而XPS或AES/XPS联合谱仪则参考FL。从FL参照转换为VL参照是

通过从电子动能中扣除谱仪逸出功而实现；一种近似方法是从FL参照的动能中扣除4.5eV，这对于大多数实

际AES和SAM应用是可行的。

5选择仪器性能参数的表述

5.1分析方法

应简要叙述用于从样品获得信息的方法，并应说明在所考虑的系统中可选择的其他分析技术。

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