GB/T 44839-2024 微机电系统（MEMS）技术 MEMS材料微柱压缩试验方法

ICS

31.080.99

CCS

L59

中华人民共和国国家标准

GB/T44839—2024/IEC62047﹘10:2011

微机电系统（MEMS）技术

MEMS材料微柱压缩试验方法

Micro-electromechanicalsystems（MEMS）

technology—

Micro-pillarcompressiontestforMEMSmaterials

（IEC62047-10:2011,Semiconductordevices—Micro-electromechanical

devices—Part10:Micro-pillarcompressiontestforMEMSmaterials,IDT）

2024-10-26发布2025-02-01实施

国家市场监督管理总局发布

国家标准化管理委员会

GB/T44839—2024/IEC62047﹘10:2011

目次

前言

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范围

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规范性引用文件

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3

术语和定义

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4

符号和名称

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5

试件

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5.1

总体要求

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5.2

试件形状

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5.3

尺寸测量

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6

试验方法和测试仪器

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6.1

测试原理

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6.2

试验仪器

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6.3

测试步骤

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6.4

试验环境

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7

测试报告

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5

附录A（资料性）

利用有限元法进行误差估计

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A.1

误差来源

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A.2

有限元模型

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A.3

分析结果

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参考文献

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Ⅰ

GB/T44839—2024/IEC62047﹘10:2011

前言

本文件按照GB/T1.1—2020《标准化工作导则第1部分：标准化文件的结构和起草规则》的规

定起草。

本文件等同采用IEC62047﹘10:2011《半导体器件微机电器件第10部分：MEMS材料微柱压

缩试验方法》。

本文件增加了“术语和定义”一章。

本文件做了下列最小限度的编辑性改动：

—为与现有标准协调，将标准名称改为《微机电系统（MEMS）技术MEMS材料微柱压缩试

验方法》；

—纳入了IEC62047﹘10:2011/COR1:2012的勘误内容，所涉及的条款的外侧页边空白位置用垂直双

线（||）进行了标示；

—5.2增加了注；

—更正了6.3c）应变速率数值，根据参考文献，数值更正为“5×10-3/min”。

请注意本文件的某些内容可能涉及专利。本文件的发布机构不承担识别专利的责任。

本文件由全国微机电技术标准化技术委员会（SAC/TC336）提出并归口。

本文件起草单位：中国科学院微电子研究所、中机生产力促进中心有限公司、苏州容启传感器科技

有限公司、武汉大学、北京大学、上海交通大学、昆山昆博智能感知产业技术研究院有限公司、苏州晶

方半导体科技股份有限公司、东南大学、苏州慧闻纳米科技有限公司、中关村光电产业协会、中国电子

产品可靠性与环境试验研究所、昆山双桥传感器测控技术有限公司、芯联集成电路制造股份有限公司、

深圳市道格特科技有限公司。

本文件主要起草人：周维虎、李根梓、孙宏霖、刘胜、霍树春、高成臣、刘景全、陈立国、

杨剑宏、陈志文、焦斌斌、黄庆安、聂萌、张平平、陈晓梅、卢永红、陈思、王冰、谢红梅、刘志广。

Ⅲ

GB/T44839—2024/IEC62047﹘10:2011

微机电系统（MEMS）技术

MEMS材料微柱压缩试验方法

1范围

本文件描述了微柱压缩试验方法，用于MEMS材料压缩特性的高精度、高重复性测量，且试样制造

难度适中；测量试样单向压缩应力﹘应变的关系，得到试样压缩弹性模量和屈服强度。

试样是通过微加工技术在刚性（或高刚度）基体上制造的圆柱，其高径比（高度与直径的比值）大

于3为宜。本文件适用于金属、陶瓷、高分子等材料制备的高度小于100μm微柱的测试。

2规范性引用文件

下列文件中的内容通过文中的规范性引用而构成本文件必不可少的条款。其中，注日期的引用文

件，仅该日期对应的版本适用于本文件；不注日期的引用文件，其最新版本（包括所有的修改单）适用

于本文件。

IEC62047﹘8半导体器件微机电器件第8部分：薄膜拉伸性能测量用带材弯曲试验方法

（Semiconductordevices—Micro﹘electromechanicaldevices—Part8:Stripbendingtestmethodfor

tensilepropertymeasurementofthinfilms）

3术语和定义

本文件没有需要界定的术语和定义。

4符号和名称

为了阐述本文件，试件的形状和符号分别在图1和表1中给出。本文件中的试件通常称为柱状

试样。

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