GB/T 20510-2024 氧化铟锡靶材

ICS

77.150.60

CCS

H62

中华人民共和国国家标准

GB/T20510—2024

代替GB/T20510—2017

氧化铟锡靶材

Indium-tinoxidetarget

2024-09-29发布2025-04-01实施

国家市场监督管理总局发布

国家标准化管理委员会

GB/T20510—2024

目次

前言

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Ⅲ

1

范围

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1

2

规范性引用文件

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1

3

术语和定义

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1

4

分类

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2

5

技术要求

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2

5.1

化学成分

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2

5.2

物理性能

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3

5.3

尺寸规格及其偏差

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3

5.4

外观质量

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3

5.5

内部质量

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3

6

试验方法

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3

6.1

化学成分

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3

6.2

物理性能

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3

6.3

尺寸规格及其偏差

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4

6.4

外观质量

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4

6.5

内部质量

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4

7

检验规则

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4

7.1

检查和验收

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4

7.2

组批

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4

7.3

检验项目

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4

7.4

取样和制样

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5

7.5

检验结果的判定

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6

8

标志、包装、运输、贮存及随行文件

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6

8.1

标志

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6

8.2

包装

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6

8.3

运输与贮存

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6

8.4

其他

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8.5

随行文件

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9

订货单内容

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7

Ⅰ

GB/T20510—2024

前言

本文件按照GB/T1.1—2020《标准化工作导则第1部分：标准化文件的结构和起草规则》的规

定起草。

本文件代替GB/T20510—2017《氧化铟锡靶材》。与GB/T20510—2017相比，除结构调整和编

辑性改动外，主要技术变化如下：

a）更改了适用范围，将“适用于以99.99%金属铟、锡为原料生产的氧化铟锡靶材”更改为“适用

于由In2O3和SnO2粉末按照一定比例混合，以常压烧结工艺生产的氧化铟锡靶材”（见第

1章，2017年版的第1章）；

b）更改了“相对密度”的定义（见3.2，2017年版的3.2）；

c）删除了“开尔文电桥”的术语和定义（见2017年版的3.3）；

d）更改了相对密度的内容（见3.2,2017年版的3.2）；

e）更改了分类方法，将按照相对密度分类方法更改为按照形状和氧化铟和氧化锡的配比分类（见

第4章,2017年版的4.1）；

f）更改了主要化学成分的要求（见5.1.1,2017年版的4.2.1）；

g）更改了物理性能的要求（见5.2，2017年版的4.3）；

h）更改了尺寸规格及其允许偏差的内容（见5.3，2017年版的4.4）；

i）更改了外观质量的要求（见5.4,2017年版的4.5）；

j）增加了内部质量的要求（见5.5）；

k）更改了化学成分分析方法（见6.1,2017年版的5.1）；

l）更改了相对密度和电阻率的检测方法（见6.2.1和6.2.2，2017年版的5.2.1和5.2.2）；

m）更改了检验项目的内容（见7.3,2017年版的6.3）。

请注意本文件的某些内容可能涉及专利。本文件的发布机构不承担识别专利的责任。

本文件由中国有色金属工业协会提出。

本文件由全国有色金属标准化技术委员会（SAC/TC243）归口。

本文件起草单位：先导电子科技股份有限公司、株洲冶炼集团股份有限公司、广西晶联光电材料有

限责任公