GB/T 44842-2024 微机电系统（MEMS）技术 薄膜材料的弯曲试验方法

ICS

31.080.99

CCS

L59

中华人民共和国国家标准

GB/T44842—2024/IEC62047﹘18:2013

微机电系统（MEMS）技术薄膜

材料的弯曲试验方法

Micro-electromechanicalsystems（MEMS）technology—

Bendtestingmethodsofthinfilmmaterials

（IEC62047-18:2013,Semiconductordevices—Micro-electromechanical

devices—Part18:Bendtestingmethodsofthinfilmmaterials,IDT）

2024-10-26发布2024-10-26实施

国家市场监督管理总局发布

国家标准化管理委员会

GB/T44842—2024/IEC62047﹘18:2013

目次

前言

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Ⅲ

1

范围

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2

规范性引用文件

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3

术语和定义

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4

符号和定义

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5

测试结构

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5.1

测试结构的设计

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5.2

测试结构的制备

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5.3

测试结构的宽度和厚度

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5.4

试验前的储存

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6

试验方法

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6.1

通则

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6.2

测试结构的安装方法

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6.3

加载方法

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6.4

试验速度

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6.5

位移测量

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6.6

试验环境

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6.7

数据分析

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6.8

测试结构用材料

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7

试验报告

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5

附录A（资料性）

测试结构/衬底接触面的注意事项

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附录B（资料性）

力﹘位移关系的必要注意事项

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Ⅰ

GB/T44842—2024/IEC62047﹘18:2013

前言

本文件按照GB/T1.1—2020《标准化工作导则第1部分：标准化文件的结构和起草规则》的规

定起草。

本文件等同采用IEC62047﹘18:2013《半导体器件微机电器件第18部分：薄膜材料的弯曲试验

方法》。

本文件增加了“术语和定义”一章。

本文件做了下列最小限度的编辑性改动：

—为与现有标准协调，将标准名称改为《微机电系统（MEMS）技术薄膜材料的弯曲试验

方法》。

请注意本文件的某些内容可能涉及专利。本文件的发布机构不承担识别专利的责任。

本文件由全国微机电技术标准化技术委员会（SAC/TC336）提出并归口。

本文件起草单位：工业和信息化部电子第五研究所、苏州市质量和标准化院、中机生产力促进中心

有限公司、成都航天凯特机电科技有限公司、苏州大学、无锡芯感智半导体有限公司、无锡华润上华科

技有限公司、西北工业大学、华南理工大学、深圳市美思先端电子有限公司、天津大学、上海临港新片

区跨境数据科技有限公司、苏州市标准化协会、安徽北方微电子研究院集团有限公司、广东润宇传感器

股份有限公司、无锡韦感半导体有限公司。

本文件主要起草人：董显山、张硕、夏燕、李根梓、蒋礼平、路国光、孙立宁、来萍、杨绍松、夏长奉、

王科、周长见、宏宇、胡晓东、胡静、张森、韦覃如、张启心、黄钦文、殷芳、王文婧、李树成、

赵成龙。

Ⅲ

GB/T44842—2024/IEC62047﹘18:2013

微机电系统（MEMS）技术薄膜

材料的弯曲试验方法

1范围

本文件描述了长度和宽度小于1mm、厚度在0.1µm~10µm的薄膜材料的弯曲试验方法。薄膜作为

主要结构材料用于微机电系统（MEMS）和微机械中。

作为微机电系统（MEMS）、微机械等器件中的主要结构材料，薄膜具有独特性，如尺寸为几微

米，采用沉积、光刻等材料制备工艺，和/或非机械加工测试结构。本文件描述了微尺度光滑悬臂式测

试结构的弯曲试验方法及测试结构形状，以保证与薄膜材料独特性相对应的测试精度。

2规范性引用文件

下列文件中的内容通过文中的规范性引用而构成本文件必不可少的条款。其中，注日期的引用文

件，仅该日期对应的版本适用于本文件；不注日期的引用文件，其最新版本（包括所有的修改单）适用

于本文件。

IEC62047﹘6:2009半导体器件微机电器件第6部分：薄膜材料的轴向疲劳试验方法（Semi﹘

conductordevices—Micro﹘electromechanicaldevices—Part6:Axialfatiguetestingmethodsofthinfilm

materials）

3术语和定义

本文件没有需要界定的术语和定义。

4符号和定义

符号及其定义见表1。

表1测试结构的符号和定义

符号单位定义

Wµm测试结构宽度

Lµm测试结构长度

Sµm测试结构厚度

LPA

LPBµm分别为加载点A、B、C与测试结构根部之间的距离（见图2）

LPC

PµN力

δµm位移

IZ(µm)4面积惯性矩

EMPa悬臂梁材料的弹性模量

1